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This hydrogen chloride gas sensor can be applied in situations where the semiconductor process industry needs to measure the concentration of hydrogen chloride gas.
| Nominal Range | 0 ~ 10 ppm |
| Maximum Overload | 20 ppm |
| Sensitivity (20℃) | -0.55 ± 0.15 μA/ppm |
| Response Time (T90) | ≤ 140 s |
| Zero Signal (20℃) | < ±0.2 μA |
| Baseline Shift (0℃ ~ 40℃) | < 1ppm |
| Resolution | 0.003 ppm |
| Linearity | Linear up to 10 ppm |
| Bias Voltage | 0 mV |
| Temperature Range | 0℃ ~ 40℃ |
| Pressure Range | 1 ± 0.1 atm |
| Humidity Range | 15% ~ 90%RH non-condensing |
| Long Time Output Drift | < 2% signal/month |
| Expected Operating Life | >2 years in clean air |
| Storage Temp | 10°C ~ 30°C |
| Storage Life | 6 months in original packaging |
| Warranty | 24 months |
| Housing Material | ABS |
| Weight (Nominal) | 5 g |
| RoHS Compliance |
Output signals from the sensor pins are different. Inappropriate use of the pins in product design will affect the sensor functionality. Exposure to high concentrations of solvent vapors should be avoided under any condition. Mechanical overstress may cause deformation or cracks of the plastic enclosure of the sensor. If the sensor is used in extreme environmental conditions, please contact us for more details.
The performance data in this document are conducted by using SemeaTech recommended test circuitry and test environment at 20°C, 50 %RH and 1 atm. Sensor performance varies under different environmental conditions. Please contact us if you need more details.
| Gas | Concentration (ppm) | Output Signal (ppm HCL equivalent) |
|---|---|---|
| Arsine | 1 | 0.1 |
| Carbon Monoxide | 2,000 | < 1.0 |
| Chlorine | 5 | 4.8 |
| Hydrogen | 1,000 | < 1.0 |
| Hydrogen Fluoride | 5 | 2.7 |
| Hydrogen Sulfide | 25 | < 2.0 |
| Nitrogen Dioxide | 5 | 0.6 |
| Phospine | 1 | -0.2 |
| Sulfur Dioxide | 10 | < 3.6 |
| Ethanol | 5,000 | 0.0 |
Note: The cross sensitivities include but not limited to the above gases. It may also respond to other gases. The data in the table above may vary from different batches of sensors and the changes of test environment. Calibration using the gases that have the cross sensitivities to this sensor is not recommended.
This sensor is designed to be used in certain instruments for life critical applications. To ensure the sensor functions per its specifications inside the instrument, it is required to read the instrument user's guide carefully and comply with the calibration procedures by using certified target calibration gas before each use. Failure to do so may cause serious injury and fatality. Please do not open the sensor plastic enclosure because the electrolyte and other chemicals stored inside are harmful.
It is highly recommended for customers to validate the sensor performance using this document as a reference for their product designs or applications.
